JPH079404Y2 - コロナ予備電離放電励起エキシマレーザ装置 - Google Patents

コロナ予備電離放電励起エキシマレーザ装置

Info

Publication number
JPH079404Y2
JPH079404Y2 JP17783587U JP17783587U JPH079404Y2 JP H079404 Y2 JPH079404 Y2 JP H079404Y2 JP 17783587 U JP17783587 U JP 17783587U JP 17783587 U JP17783587 U JP 17783587U JP H079404 Y2 JPH079404 Y2 JP H079404Y2
Authority
JP
Japan
Prior art keywords
electrode
discharge
corona
ceramics
excimer laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17783587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0180966U (en]
Inventor
紳二 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17783587U priority Critical patent/JPH079404Y2/ja
Publication of JPH0180966U publication Critical patent/JPH0180966U/ja
Application granted granted Critical
Publication of JPH079404Y2 publication Critical patent/JPH079404Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Lasers (AREA)
JP17783587U 1987-11-20 1987-11-20 コロナ予備電離放電励起エキシマレーザ装置 Expired - Lifetime JPH079404Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17783587U JPH079404Y2 (ja) 1987-11-20 1987-11-20 コロナ予備電離放電励起エキシマレーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17783587U JPH079404Y2 (ja) 1987-11-20 1987-11-20 コロナ予備電離放電励起エキシマレーザ装置

Publications (2)

Publication Number Publication Date
JPH0180966U JPH0180966U (en]) 1989-05-30
JPH079404Y2 true JPH079404Y2 (ja) 1995-03-06

Family

ID=31469486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17783587U Expired - Lifetime JPH079404Y2 (ja) 1987-11-20 1987-11-20 コロナ予備電離放電励起エキシマレーザ装置

Country Status (1)

Country Link
JP (1) JPH079404Y2 (en])

Also Published As

Publication number Publication date
JPH0180966U (en]) 1989-05-30

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